Accession Number:

ADA458816

Title:

Thermoreflectance Imaging of Superlattice Micro Refrigerators

Descriptive Note:

Conference paper

Corporate Author:

CALIFORNIA UNIV SANTA CRUZ SCHOOL OF ENGINEERING

Report Date:

2001-03-01

Pagination or Media Count:

6.0

Abstract:

High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integrated circuit, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental setup, we expect to obtain thermal images with sub-micron spatial resolution.

Subject Categories:

  • Electrical and Electronic Equipment
  • Photography
  • Crystallography
  • Thermodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE