Accession Number:

ADA458443

Title:

High Resolution Non-Contact Thermal Characterization Semiconductor Devices

Descriptive Note:

Conference paper

Corporate Author:

CALIFORNIA UNIV SANTA CRUZ SCHOOL OF ENGINEERING

Report Date:

2006-01-01

Pagination or Media Count:

8.0

Abstract:

Non-contact optical methods can be used for sub micron surface thermal characterization of active semiconductor devices. Point measurements were first made, and then real time thermal images were acquired with a specialized PINarray detector. This method of thermal imaging can have spatial resolution better than the diffraction limit of an infrared camera and can work in a wide range of ambient temperatures. The experimentally obtained thermal resolution is on the order of 50mK.

Subject Categories:

  • Electrical and Electronic Equipment
  • Optics
  • Thermodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE