Sputtering Studies of Multi-Component Materials by Weight Loss and Cavity Ring-Down Spectroscopy (Postprint)
AIR FORCE RESEARCH LAB EDWARDS AFB CA PROPULSION DIRECTORATE
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We report sputtering studies of multi-component spacecraft materials. We employ two complementary diagnostic methods weight loss measurements and cavity ring-down spectroscopy CRDS. The weight loss measurements provide total sputter yields as a function of ion energy and incidence angle. We present sputter yields from weight loss measurements for xenon ion sputtering of molybdenum, quartz, boron nitride, and kapton. The CRDS provides species-specific sputtering data number density and velocity as well as information on the differential angular sputtering distributions. We present CRDS results for the sputtering of molybdenum from a molybdenum sample, and demonstrate measurements of multi-component materials by measuring the sputtering of chromium, iron, and molybdenum from Inconel 718.
- Inorganic Chemistry
- Fabrication Metallurgy
- Unmanned Spacecraft