A Transient Spice Model for Dielectric-Charging Effects in RF Mems Capacitive Switches (Preprint)
Journal article Preprint
MEMTRONICS PLANO TX
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A transient SPICE model for dielectric-charging effects in RF MEMS capacitive switches was developed and implemented in a popular microwave circuit simulator. In this implementation the dielectric-charging effects are represented by RC sub-circuits with the sub-circuit parameters extracted from directly measured charging and discharging currents in the pA range. The resulted model was used to simulate the actuation-voltage shift in RF MEMS capacitive switches due to repeated operation and charging of the switch dielectric. Agreement was obtained between the simulated and measured actuation-voltage shift under various control waveforms. For RF MEMS capacitive switches that fail mainly due to dielectric charging, the present SPICE model can be used to design control waveforms that can either prolong lifetime or accelerate failure.
- Electrical and Electronic Equipment
- Radiofrequency Wave Propagation