DID YOU KNOW? DTIC has over 3.5 million final reports on DoD funded research, development, test, and evaluation activities available to our registered users. Click
HERE to register or log in.
Accession Number:
ADA455343
Title:
Control Issues for Microelectromechanical Systems
Descriptive Note:
Journal article
Corporate Author:
TEXAS UNIV AT ARLINGTON
Report Date:
2006-04-01
Pagination or Media Count:
6.0
Abstract:
MEMS is a disruptive technology that requires unparalleled synergy between previously unrelated fields such as biology and microelectronics. With successful integration of electrical, mechanical, material, computer science, control, and bioengineering, new MEMS applications are emerging. Progress is facilitated by the fact that silicon, which is among the worlds best-characterized materials, surpasses stainless steel in yield strength and aluminum in strengthtoweight ratio. Despite their small size on the order of that of a human hair, however, MEMS devices are no less mechanical or complex than bridges and skyscrapers. The first closed-loop controlled MEMS devices were sensors that included on-chip actuators to enhance the accuracy of the measurement process, either by forceposition amplification or by better presenting the measured quantity to the sensor. Below, we highlight some MEMS control issues.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE