Accession Number:

ADA455343

Title:

Control Issues for Microelectromechanical Systems

Descriptive Note:

Journal article

Corporate Author:

TEXAS UNIV AT ARLINGTON

Personal Author(s):

• Borovic, B.
• Lewis, F. L.
• McCulley, W.
• Liu, Ai Q.
• Kolesar, E. S.
• Popa, D. O.

Report Date:

2006-04-01

Pagination or Media Count:

6.0

Abstract:

MEMS is a disruptive technology that requires unparalleled synergy between previously unrelated fields such as biology and microelectronics. With successful integration of electrical, mechanical, material, computer science, control, and bioengineering, new MEMS applications are emerging. Progress is facilitated by the fact that silicon, which is among the worlds best-characterized materials, surpasses stainless steel in yield strength and aluminum in strengthtoweight ratio. Despite their small size on the order of that of a human hair, however, MEMS devices are no less mechanical or complex than bridges and skyscrapers. The first closed-loop controlled MEMS devices were sensors that included on-chip actuators to enhance the accuracy of the measurement process, either by forceposition amplification or by better presenting the measured quantity to the sensor. Below, we highlight some MEMS control issues.

Descriptors:

• *FINITE ELEMENT ANALYSIS
• *MICROELECTROMECHANICAL SYSTEMS
• REPRINTS
• SILICON
• ELECTROSTATICS
• SURFACE TENSION
• STRENGTH WEIGHT RATIO
• MODELS

Subject Categories:

• Electrical and Electronic Equipment
• Numerical Mathematics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE