Accession Number:

ADA454511

Title:

Real-Time Optical Control of Ga1-xInxP Film Growth by P-Polarized Reflectance

Descriptive Note:

Corporate Author:

NORTH CAROLINA STATE UNIV AT RALEIGH CENTER FOR RESEARCH IN SCIENTIFIC COMPUTATION

Personal Author(s):

Report Date:

1999-01-01

Pagination or Media Count:

16.0

Abstract:

The engineering of advanced optoelectronic integrated circuits implies the stringent control of thickness and composition. These demands led to the development of surface-sensitive real-time optical sensors that are able to move the control point close to the point where the growth occurs- which in a chemical beam epitaxy process is the surface reaction layer SRL built up of physisorbed and chemisorbed precursor fragments between the ambient and film interface. In this contents we explored the application of p-polarized reflectance spectroscopy PRS for real-time monitoring and control of pulsed chemical beam epitaxy PCBE during low temperature growth of epitaxial Ga1-xInxP heterostructures on Si001 substrates. A reduced order surfuce kinetics ROSK model has been developed to describe the decomposition and growth kinetics of the involved organonetallic precursors and their incorporation in the film deposition. We denonstrate the linkage of the PRS response towards surfuce reaction chemistry composition film growth rate and film properties. Mathematical control algorithms are applied that link the PR signals to the growth process control parameters to control composition and growth rate of epitaxial Ga1-xInxP heterostructures.

Subject Categories:

  • Electrooptical and Optoelectronic Devices
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE