Low Temperature Study of Loss Mechanisms of Mechanical Oscillators
NAVAL RESEARCH LAB WASHINGTON DC
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In order to understand the loss mechanism of mechanical oscillators in micro-electromechanical systems, we have studied the temperature dependence of the quality factor Q of a high Q silicon mechanical oscillator from 0.4 K to 300 K. At temperatures above 70 K, the energy loss is principally caused by thermoelastic effect in the flexural components of the modes. Below 50 K, we find the improvements in vibration isolation guided by the finite element method do not significantly improve its Q. This indicates that some intrinsic loss mechanism may still be important even at low temperatures.
- Electrical and Electronic Equipment