Accession Number:

ADA445705

Title:

Real-time Optical Control of Ga(1-x)In(x)P Film Growth

Descriptive Note:

Research rept.

Corporate Author:

NORTH CAROLINA STATE UNIV AT RALEIGH DEPT OF PHYSICS

Personal Author(s):

• Dietz, N.
• Woods, V.
• Ito, K.
• Lauko, I.

Report Date:

1999-08-01

Pagination or Media Count:

10.0

Abstract:

This paper describes results on open- and closed-loop controlled growth of epitaxial GaPGa1-xInxP heterostructures on Si001 substrates. The layers are grown in a low pressure pulsed chemical beam epitaxy PCBE reactor utilizing real time optical p-polarized reflectance PRS probing. The results of the implemented closed loop controlled growth favorably compare to the films grown using pre-designed source injection profiles based on an experimental data base.

Descriptors:

• *REAL TIME
• *THIN FILMS
• *EPITAXIAL GROWTH
• *CLOSED LOOP SYSTEMS
• DATA BASES
• GALLIUM COMPOUNDS
• MASS SPECTROSCOPY
• X RAY DIFFRACTION
• OPTICAL PROPERTIES
• EXPERIMENTAL DATA

Subject Categories:

• Electrical and Electronic Equipment
• Crystallography
• Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE