Real-time Optical Control of Ga(1-x)In(x)P Film Growth
NORTH CAROLINA STATE UNIV AT RALEIGH DEPT OF PHYSICS
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This paper describes results on open- and closed-loop controlled growth of epitaxial GaPGa1-xInxP heterostructures on Si001 substrates. The layers are grown in a low pressure pulsed chemical beam epitaxy PCBE reactor utilizing real time optical p-polarized reflectance PRS probing. The results of the implemented closed loop controlled growth favorably compare to the films grown using pre-designed source injection profiles based on an experimental data base.
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- Nuclear Physics and Elementary Particle Physics