The Importance of Network Structure in High-K Dielectrics: LaAlO3, Pr2O3, and Ta2O5
AIR FORCE RESEARCH LAB KIRTLAND AFB NM SPACE VEHICLES DIRECTORATE
Pagination or Media Count:
Measurements of the dielectric constant of amorphous and crystalline Pr2O3 are reported. The high value -25 for the polycrystalline phase is discussed in terms or the network structure and comparison is made with heavy rare-earth oxide values. The specific cases of LaAlO1 and Ta2O5 are also discussed and the role of network structure evidenced and elucidated. A potential route to finding high kappa materials suitable for microelectronics applications is suggested.
- Miscellaneous Materials
- Electricity and Magnetism
- Electrical and Electronic Equipment