Micro Piezoelectric Ultrasonic Motors
PENNSYLVANIA STATE UNIV UNIVERSITY PARK
Pagination or Media Count:
This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5mm in diameter and O.8mNm in torque have been actually developed.
- Electrical and Electronic Equipment
- Electricity and Magnetism