Accession Number:

ADA429177

Title:

Fabrication, Metrology and Modeling of Protective Coatings on Metallic MEMS Components

Descriptive Note:

Final progress rept. 12 Jul 1999-31 Aug 2003

Corporate Author:

VANDERBILT UNIV NASHVILLE TN

Personal Author(s):

Report Date:

2003-12-11

Pagination or Media Count:

21.0

Abstract:

The original motivation for this work was to develop coating for metallic MEMS components to improve their performance and reliability. During a review of refractory oxides a report came to our attention that indium tin oxide ITO, well known as the most widely used transparent conductor, is also piezoresistive. Thus, in principle, coating of ITO either alone or in combination with other thin films might be both protective and electrically functional.

Subject Categories:

  • Inorganic Chemistry
  • Coatings, Colorants and Finishes

Distribution Statement:

APPROVED FOR PUBLIC RELEASE