Fabrication, Metrology and Modeling of Protective Coatings on Metallic MEMS Components
Final progress rept. 12 Jul 1999-31 Aug 2003
VANDERBILT UNIV NASHVILLE TN
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The original motivation for this work was to develop coating for metallic MEMS components to improve their performance and reliability. During a review of refractory oxides a report came to our attention that indium tin oxide ITO, well known as the most widely used transparent conductor, is also piezoresistive. Thus, in principle, coating of ITO either alone or in combination with other thin films might be both protective and electrically functional.
- Inorganic Chemistry
- Coatings, Colorants and Finishes