Accession Number:

ADA426855

Title:

Microelectromechanical System Pressure Sensor for Projectile Applications

Descriptive Note:

Final rept. 1999-2003

Corporate Author:

ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE

Personal Author(s):

Report Date:

2004-09-01

Pagination or Media Count:

20.0

Abstract:

A miniaturized high pressure sensor for cannon-launched munitions was fabricated, based on microelectromechanical system MEMS technology. It uses a 0.5 microns thin film of lead zirconate titanate PZT material for producing an electrical charge that is directly proportional to the pressure. The sensor was mounted on a customized stainless steel housing, placed into a high pressure vessel, and tested to a maximum pressure of 40,000 psi. The shape and configuration of the platinum PtPZTPt layered structure has been redesigned to reduce the complexity of wire interconnections and to increase the charge output of the device.

Subject Categories:

  • Electrical and Electronic Equipment
  • Test Facilities, Equipment and Methods
  • Fluid Mechanics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE