Microelectromechanical System Pressure Sensor for Projectile Applications
Final rept. 1999-2003
ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE
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A miniaturized high pressure sensor for cannon-launched munitions was fabricated, based on microelectromechanical system MEMS technology. It uses a 0.5 microns thin film of lead zirconate titanate PZT material for producing an electrical charge that is directly proportional to the pressure. The sensor was mounted on a customized stainless steel housing, placed into a high pressure vessel, and tested to a maximum pressure of 40,000 psi. The shape and configuration of the platinum PtPZTPt layered structure has been redesigned to reduce the complexity of wire interconnections and to increase the charge output of the device.
- Electrical and Electronic Equipment
- Test Facilities, Equipment and Methods
- Fluid Mechanics