Accession Number:

ADA422237

Title:

Fabrication, Metrology and Modeling of Protective Coatings on Metallic MEMS Components

Descriptive Note:

Final Progress rept. 12 Jul 1999-31 Aug 2003

Corporate Author:

VANDERBILT UNIV NASHVILLE TN

Personal Author(s):

Report Date:

2003-11-07

Pagination or Media Count:

21.0

Abstract:

This project provided a proof-of-concept that indium tin oxide ITO thin films can be prepared on surfaces by pulsed laser deposition and configured as miniature strain gauges. The degree of piezoresistivity of the films is related to the oxygen content, with larger gauge factors correlated with oxygen excess. Typical gauge factors of order 10 were observed. Gauges as small as 20x 100 microns were fabricated by focused ion beam milling and characterized. Radiation effects from ion beam milling were observed and measured. Structures encapsulated with silicon dioxide protective films retailed their piezoresistive coefficient and were less susceptible to damage by focused ion beam imaging.

Subject Categories:

  • Inorganic Chemistry
  • Metallurgy and Metallography
  • Protective Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE