A Proposal to Acquire a Micro Thermal Imaging Microscope
ILLINOIS UNIV AT URBANA DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
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We purchased an InfraScope II thermal imaging microscope from Quantum Focus Instruments Corporation. The machine was purchased within a month after receiving the DURIP funds, and was installed in the Micro and Nanotechnology Laboratory. The total cost of the QFI InfraScope II Infrared Imaging Microscope is 129,540 charged to the core account plus 23,373, charged to a match account provided by the Electrical and Computer Engineering Department of the University of Illinois. We have used the machine in a number of scientific research projects. The unique infrared microscopy capability provides capability to conduct temperature measurement on many micro devices, including thermally active dip pen nanolithography DPN probes, Parylene surface micromachined fluid shear stress sensors, in situ Parylene thickness sensors, micro heaters for fluidics applications, and three dimensional hot wire anemometers. The measurement capability allows us to have accurate rate in short time, providing significant benefits for many DoD funded work. Results obtained using the microscope have been used to validate design concept and to confirm accuracy of numerical modeling. Results are published in 3 peer reviewed conference papers, 1 journal paper, and 2 journal paper submissions.
- Test Facilities, Equipment and Methods
- Electrical and Electronic Equipment