Accession Number:

ADA416827

Title:

Parallel, Ultrafast Sub-100 Nanometer Dip-Pen Nanolithography

Descriptive Note:

Final rept. 1 Jul 2000-31 Jan 2003

Corporate Author:

NORTHWESTERN UNIV EVANSTON IL DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

2003-06-16

Pagination or Media Count:

30.0

Abstract:

We have developed new designs and fabrication techniques for arrayed one dimensional and two dimensional DPN probes in two categories, passive probes and active probes. We have successfully developed mechanical and electrical interfaces to commercial AFM machines and software. Arrayed DPN writing has been achieved. As a highlight, a set of ten different characters has been written using ten different pens in one single run. We also have significantly advanced the chemistry compatible with the DPN technique. We have demonstrated the patterning of organic molecules e.g., self-assembled monolayers biological molecules protein, and DNA molecules and inorganic materials e.g., sol-gel, silicon, and magnetic nanoparticles. Potential applications of DPN have now been extended to the semiconductor industry e.g., mask repair and patterning of semiconductor substrates and thin films with sub-100 nm resolution, as well as military and medical diagnostics e.g., DNA and protein arrays. We also have developed efficient and high yield microfabrication processes for realizing 2D probe arrays with uniform and small tip radii. A method for detecting tipsubstrate contact has been developed using electrical continuity. In summary, we have successfully completed proposed tasks outlined in the proposal. We plan to develop high- density 2D arrays DPN robes with efficient inking method.

Subject Categories:

  • Industrial Chemistry and Chemical Processing
  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE