Accession Number:

ADA415708

Title:

The Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress

Descriptive Note:

Master's thesis

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING AND MANAGEMENT

Personal Author(s):

Report Date:

2003-03-25

Pagination or Media Count:

217.0

Abstract:

The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system MEMS electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in-situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megaradSi using both the Air Force Research Laboratorys low energy X-ray source and Co-60 gamma source.

Subject Categories:

  • Electrical and Electronic Equipment
  • Radioactivity, Radioactive Wastes and Fission Products

Distribution Statement:

APPROVED FOR PUBLIC RELEASE