Accession Number:

ADA411620

Title:

Microelectromechanical (MEMS)-Based Data Storage

Descriptive Note:

Final technical rept. Aug 1998-Feb 2002

Corporate Author:

HEWLETT-PACKARD LABS PALO ALTO CA

Personal Author(s):

• Hartwell, Peter
• Yoon, Uija
• Tien, Norman C.
• Hunt, Charles E.

Report Date:

2003-02-01

Pagination or Media Count:

101.0

Abstract:

This project developed and demonstrated design and fabrication technologies required to enable mass production of MEMS micromovers and electrostatic motors required to actuate these structures, including suspension systems of unprecedented high aspect ration by Hewlett Packard. Single and multiple level electrical interconnect fabrication techniques were developed and refined by Cornell University. A technique to fabricate large arrays of field emission tips was developed by U.C. Davis.

Descriptors:

• *FIELD EMISSION
• *DATA STORAGE SYSTEMS
• *MICROELECTROMECHANICAL SYSTEMS
• METHODOLOGY
• ARRAYS
• HIGH DENSITY
• CIRCUIT INTERCONNECTIONS
• SUSPENSION DEVICES
• ELECTROSTATICS

Subject Categories:

• Electrical and Electronic Equipment
• Computer Hardware

Distribution Statement:

APPROVED FOR PUBLIC RELEASE