Accession Number:

ADA411208

Title:

Development of MOEMS and Smart Systems Based on Transparent Metals

Descriptive Note:

Final technical rept.

Corporate Author:

CATANIA UNIV (ITALY)

Personal Author(s):

Report Date:

2002-10-01

Pagination or Media Count:

16.0

Abstract:

This final interim report includes a statement of the problem studied, a summary of the most important results obtained during the development of the work and in the last four months, after the realization and the chracterization of the designed MOEMS prototypes. A detailed description of the etching procedures techniques at the laboratories of CNM, Spain is reported together with the simulations and the experimental measures made at the laboratories of AMSAM-RD-WS-ST, Huntsville AL, USA. A theoretical models of the final transducer is considered thus showing a very high optical sensitivity with respect to the displacement of the realized micro-suspended plates, where the PBG structures will be deposited in the next future.

Subject Categories:

  • Electrooptical and Optoelectronic Devices
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE