Accession Number:

ADA408325

Title:

PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) Actuator with Macroscopic Action

Descriptive Note:

Final rept. Jul 1998-May 2002

Corporate Author:

HONEYWELL INC PLYMOUTH MN

Personal Author(s):

Report Date:

2002-09-01

Pagination or Media Count:

83.0

Abstract:

A polymer-based MEMS actuator, consisting of small unit cells in a macroscopic array, was developed and demonstrated. Models were developed which predicted the performance, and actuators were fabricated which matched the theoretical predictions. Deformation due to imperfect assembly resulted in imperfect performance. Further work is required to develop a reliable assembly process. Numerous polymer-based fabrication procedures were developed. Many of them borrow from either silicon or flexible printed circuit manufacturing, but modifications were necessary in order to adapt the processes to MEMS. The actuator is very efficient and uses very little power, making it suitable for autonomous applications such as robots.

Subject Categories:

  • Polymer Chemistry
  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE