Integrated Microelectromechanical Process and Circuit Technology
Final rept. Sep 1997-Sep 2000
DUKE UNIV DURHAM NC DEPT OF ELECTRICALAND COMPUTER ENGINEERING
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Duke University in partnership with Carnegie Mellon University and the MCNC MEMS Technology Applications Center has performed a research effort to develop new technologies in the area of integrated microelectromechanical systems MEMS. The research in Integrated Microelectromechanical Process and Circuit Technology IMPACT was organized and structured to promote key advancements in MEMS that leveraged state-of-the-art technologies. The goals of the program were based on the need to decouple circuit and process design activities, and thereby promote a common front-end to MEMS design tools, as has been done in the integrated circuit arena. Specifically, the goal of IMPACT was to develop a circuit-level design capture and optimization tool set for MEMS technology having a beneficial impact comparable to that of physical-level schematic capture and layout tools developed for IC technology.
- Electrical and Electronic Equipment