Accession Number:

ADA399579

Title:

Antenna-Coupled Uncooled Infrared Focal Plane Arrays: In-house Fabrication

Descriptive Note:

Final rept. 1 May 2000-26 Feb 2002

Corporate Author:

UNIVERSITY OF CENTRAL FLORIDA ORLANDO CENTER FOR RESEARCH IN ELECTRO-OPTICS AND LASERS

Personal Author(s):

• Boreman, Glenn

Report Date:

2002-02-26

Pagination or Media Count:

4.0

Abstract:

Under the support of the subject DURIP grant, University of Central Florida CREOL has developed an in-house capability for direct-write electron-beam fabrication of the microantenna coupled infrared sensors being investigated for contract to BMDO. The facility developed has resulted in shorter turn-around times for exploration of new device designs while giving a greater degree of process control. Establishment of this facility at CREOL has provided a cost-effective means for prototype device development for infrared focal-plane array applications.

Descriptors:

• *FABRICATION
• *FOCAL PLANE ARRAYS
• INFRARED DETECTORS
• COUPLED ANTENNAS
• ELECTRON BEAM LITHOGRAPHY

Subject Categories:

• Electrooptical and Optoelectronic Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE