Accession Number:

ADA394704

Title:

New Directions in Mask Engineering

Descriptive Note:

Final rept. 1 Aug 2000-15 Jun 2001

Corporate Author:

CAMBRIDGE HYDRODYNAMICS INC PRINCETON NJ

Report Date:

2001-06-15

Pagination or Media Count:

78.0

Abstract:

The scattering of electromagnetic waves from complex objects coated with lossy materials with negative and positive permittivity embedded in a layered medium is analyzed via new formulations, and a new set of algorithms to implement these formulations is introduced. This new technology is applied here to phase shifted photomasks. The results for various wavelengths and mask thicknesses have been considered carefully and are reported here.

Subject Categories:

  • Protective Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE