MEMS-Based Probes for Velocity and Pressure Measurements in Unsteady and Turbulent Flowfields
Final rept 1 Dec 1997-31 Mar 2001
TEXAS A AND M UNIV COLLEGE STATION DEPT OF AEROSPACE ENGINEERING
Pagination or Media Count:
This report presents our work in the development of fast-response, high-accuracy multi-sensor pressure probes of miniature size for velocity and pressure measurement in unsteady and turbulent flowfields, with emphasis on MEMS-based pressure probes. The fabrication and calibration theoretical and experimental of miniature order of 1mm to 2mm in diameter 5-sensor hemispherical-tip probes, are discussed. The first stages of the development process have been to fabricate a sensitive MEMS pressure sensor and to develop calibration algorithms and environments for fast-response probes. The work resulted in a prototype MEMS-based 5 sensor probe, several embedded-sensor, fast response 5-sensor probes, and high accuracy steady and unsteady probe calibration and data-reduction algorithms. The work has produced a new type of flow-diagnostics probes that are anticipated to prove valuable to the fluid mechanics community. They are significantly more rugged than hot-wires and much less dependent on repetitive and tedious calibration provide much larger measurable flow angularity and although they are not there yet, we soon expect them to be able to match or exceed a hot-wires spatial resolution capabilities and compete with a hot-wires frequency response.
- Fluid Mechanics