Accession Number:

ADA393654

Title:

MEMS Direct View Infrared Vision System (DVIR)

Descriptive Note:

Final rept. Sep 1998-Nov 2000

Corporate Author:

SARNOFF CORP PRINCETON NJ

Personal Author(s):

Report Date:

2001-06-01

Pagination or Media Count:

73.0

Abstract:

Sarnoff has fabricated 16 x 16 pixel arrays of gated field emitters in which the gate plates are MEMS structures actuated by infrared radiation in the 8 - 12 micro regime. The actuators consist of 250 micro SiC, 20 nm TiW, and 300 nm Au.

Subject Categories:

  • Infrared Detection and Detectors

Distribution Statement:

APPROVED FOR PUBLIC RELEASE