MEMS Direct View Infrared Vision System (DVIR)
Final rept. Sep 1998-Nov 2000
SARNOFF CORP PRINCETON NJ
Pagination or Media Count:
Sarnoff has fabricated 16 x 16 pixel arrays of gated field emitters in which the gate plates are MEMS structures actuated by infrared radiation in the 8 - 12 micro regime. The actuators consist of 250 micro SiC, 20 nm TiW, and 300 nm Au.
- Infrared Detection and Detectors