Accession Number:

ADA393433

Title:

4TH International Workshop. Microwave Discharges: Fundamentals and Applications

Descriptive Note:

Conference proceedings

Corporate Author:

UNITED PHYSICAL SOCIETY OF THE RUSSIAN FEDERATION MOSCOW

Personal Author(s):

Report Date:

2000-09-01

Pagination or Media Count:

294.0

Abstract:

The Final Proceedings for Fourth International Workshop on Microwave Discharges Fundamental and Applications, 18 September 2000 - 22 September 2000. This is an interdisciplinary conference. Topics include Methods of microwave plasma generation High and low pressure microwave discharges Continuous wave and pulsed microwave discharges Interaction of microwaves with a plasma Discharge modeling and diagnostics Applications of microwave plasma surface treatment etching, film deposition, growth of structures, light sources, analytical chemistry, etc. and selected topics of closely-related gas discharges problems.

Subject Categories:

  • Plasma Physics and Magnetohydrodynamics
  • Radiofrequency Wave Propagation

Distribution Statement:

APPROVED FOR PUBLIC RELEASE