Microelectromagnetic Systems (MEMS) Electrostatic Switching Technology for Microwave Systems
Final rept. 19 Sep 1995-10 Dec 2000
AIR FORCE RESEARCH LAB WRIGHT-PATTERSON AFB OH SENSORS DIRECTORATE
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The development of microelectromechanical Systems MEMS switch technology and integration of this technology into radio frequency RF electronics has created numerous applications for both commercial and military systems. The incorporation of RF MEMS switches into microwave systems offers unprecedented reductions in insertion loss on-resistance with extremely low switching power levels as compared with active devices such as field effect transistors FETs and positive-intrinsic-negative PIN diodes. Achievement of these performance improvements creates new opportunities for radar systems. The overall objective of this research was the design, fabrication, and characterization of MEMS switches fabricated on gallium arsenide substrates with possible application into microwave systems.
- Electrical and Electronic Equipment
- Non-electrical Energy Conversion