A Multidisciplinary Research Proposal for MEMS-Based Smart Gas Turbine Engines
Final progress rept. 1 Jul 1995-30 Jun 2000
CASE WESTERN RESERVE UNIV CLEVELAND OHDEPT OF ELECTRICAL ENGINEERING AND COMPUTER SCIENCES
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The objective of this program is to develop sensor and actuator array technologies based on microelectromechanical systems MEMS for distributed measurement and actuation in harsh environments. Currently MEMS devices are fabricated primarily from silicon, which limits application areas to temperatures below 25 deg C. We are developing silicon carbide SiC as a material for MEMS in harsh temperature, corrosive, and erosive environments. To this end, we have focussed a major part of this program on the development of materials and processing techniques required to fabricate SiC-based MEMS structures. This document serves as the final progress report for this program.
- Electrical and Electronic Equipment
- Non-electrical Energy Conversion