Accession Number:

ADA390065

Title:

Optical Readout of MEMS. 1999 IRIS Materials Meeting Held on 16-19 August 1999

Descriptive Note:

Briefing charts

Corporate Author:

TENNESSEE UNIV KNOXVILLE

Personal Author(s):

Report Date:

1999-08-19

Pagination or Media Count:

15.0

Abstract:

Over the past decade the field of micro-electro-mechanical systems MEMS has attracted increased interest. Miniaturization of mechanical systems promise new directions in the progress of science and technology.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE