Si Based Nanostructure Growth Subsystem with Atomic Scale Control. Supersonic Molecular Beam Array Cell
Final rept. 1 Aug 1996-31 Jul 1998
CALIFORNIA UNIV LOS ANGELES
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The Following Equipment was Purchased KSA 400 Computer System, Si Molecular Beam Epitaxy System, and Compact Modular Plasma System. This equipment was used to perform research in an effort to determine the mechanism of facet growth occuring in selective epitaxial growth and to produce Si based nanostructures using a supersonic molecular beam.
- Electrical and Electronic Equipment
- Inorganic Chemistry
- Test Facilities, Equipment and Methods