Procedure for Substrate Temperature Control Using the Pyrometer During MBE Growth
Final rept. Jan-Jun 2000
ARMY RESEARCH LAB ADELPHI MD
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Command procedures have been developed for the Army Research Laboratory molecular beam epitaxy MBE computer control system that allow a user to automatically outgas and desorb the oxide from substrates before growth, as well as set substrate temperatures based on pyrometer readings during growths. These procedures allow completely unattended growth of structures once suitable temperatures have been determined.
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