Micromachines for Microchips: Bringing the AFM up to Speed
Final rept. May-Sep 2000
NANODEVICES INC SANTA BARBARA CA
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This Interim Phase I Phase II SBIR final report, developed under contract for topic number DARPA SB992-039, outlines improvements made to the atomic force microscope AFM in order to increase its imaging speed 10 to 100 times during standard operation. Faster imaging will allow the AFM to be used in high throughput military and microelectronic manufacturing applications. In the Phase I effort, the work done under this contract eliminated the rate-limiting element of the conventional AFM the piezoelectric z-axis tube actuator. The interim work, which is described herein, developed a new type of tip for the AFM cantilever. This new tip is sharp, high aspect ratio, tall, and symmetric on the scan angle of the AFM. These are the necessary requirements for a cantilever that is to be used on the AFM system developed in the Phase I effort. With the new tip and the Phase I results, this effort is on track for completing the Phase II effort and moving the high speed ARM system into commercial and military application.