Accession Number:

ADA379248

Title:

35 GHz Microswitch Beam-Steering Grids

Descriptive Note:

Final rept.

Corporate Author:

CALIFORNIA INST OF TECH PASADENA

Personal Author(s):

• Rutledge, David B.
• Hirvonen, Taavi

Report Date:

2000-05-23

Pagination or Media Count:

9.0

Abstract:

The goal was to design and fabricate beam-steering arrays based on micro-electro-mechanical-systems MEMS at millimeter wavelengths 35 and 94 GHz. The design was based on a unit-cell waveguide model, and HFSS was used in the theoretical analyses. Dry substrate etch with a SiSiO2 membrane was found to be the most promising fabrication technology. Rockwell Science Center manufactured the arrays. The measured passive structures show a good performance. The phase difference between an inductive and a capacitive pair is about 125 deg at a frequency range of 75-90 GHz. The average loss at 77 GHz is about 3.2 dB. Good agreement between theoretical and experimental results was found. Rockwell has had difficulties in fabricating the micro switch arrays. A major difficulty has been fabrication of switches on membrane. The switches have showed an increased deflection upwards with time. Some switches fractured during wire bonding. Other switches broke during actuation. These fabrication issues must be resolved before this approach becomes practical.

Descriptors:

• *ARRAYS
• *BEAM STEERING
• FABRICATION
• MILLIMETER WAVES
• SILICON
• WAFERS
• MICROELECTROMECHANICAL SYSTEMS

Subject Categories:

• Manufacturing and Industrial Engineering and Control of Production Systems
• Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE