Quantitative Energy Dispersive X-Ray Spectrometry Using an Emispec Vision System
NAVAL POSTGRADUATE SCHOOL MONTEREY CA DEPT OF PHYSICS
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The purpose of this work was to investigate the use of an Emispec Vision system to analyze energy dispersive x-ray spectra EDS obtained with the Topcon 002B transmission electron microscope TEM in the Materials Science Laboratory at the Naval Postgraduate School. A series of tests performed with a standard NiO sample revealed that the TEM column and EDS detector were operating in a satisfactory fashion. NiO spectra acquired with different sample tilt-angles were used to test the Emispec software. An improved setup configuration, in which accurate quantification is obtained with the sample at zero tilt-angle, was developed. Quantification tests performed with TiO2, Cu-Al2O3 and alumina-YAG with 2.5 TiO2 samples confirmed the accuracy of the new software setup. Line profiles across the alumina-YAG interfaces were also recorded to verify the performance of the Emispec system for spectrum profile acquisition and to investigate the Ti distribution at the interface of the alumina-YAG heat-treated sample.
- Atomic and Molecular Physics and Spectroscopy
- Nuclear Physics and Elementary Particle Physics