Accession Number:

ADA370926

Title:

Proceedings of the Biennial Conference (11th) on Insulating Films on Semiconductors Held in Kloster Banz, Germany on June 16-19, 1999 (Microeletronic Engineering, Volume 48, No. 1-4, September 1999)

Descriptive Note:

Conference proceedings

Corporate Author:

ERLANGEN-NUERNBERG UNIV (GERMANY F R)

Personal Author(s):

• Schulz, Max
• Brendel, Rolf

Report Date:

1999-09-01

Pagination or Media Count:

454.0

Abstract:

The Final Proceedings for Insulating Films on Semiconductors, 16 June 1999 - 19 June 1999. This is an interdisciplinary conference. Topics include dielectrics, semiconductorinsulator interfaces, and the physics and technology of field effect MIS, MOS semiconductor devices, atomic scale processing, characterization and measurement techniques, radiation and hot carrier reliability, novel materials, and processing technologies. Special emphasis will be given to ultra thin oxides on silicon.

Descriptors:

• *INSULATION
• *THIN FILMS
• *SEMICONDUCTOR DEVICES
• MEASUREMENT
• RADIATION
• SYMPOSIA
• COMPOSITE MATERIALS
• DIELECTRICS
• CHARGE CARRIERS
• FIELD EFFECT TRANSISTORS
• METAL OXIDE SEMICONDUCTORS
• HIGH ENERGY
• SILICON
• GERMANY
• ATOMIC PROPERTIES

Subject Categories:

• Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE