Modulation of Electrostatic Microelectromechanical Mirrors Using a CMOS Controller
AIR FORCE INST OF TECH WRIGHT-PATTERSONAFB OH SCHOOL OF ENGINEERING
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Microelectromechanical Systems MEMS is a rapidly growing technology that lends itself particularly well to optical applications. An example of an optical MEMS device is the piston-action mirror that modulates the phase of reflected light. The phase of reflected light can be varied using thermal or electrostatic actuation to control the position of the mirror. In previous research, a modulation method to control thermally actuated mirrors was developed. This thesis presents the development, implementation, fabrication, and testing of a complimentary metal oxide semiconductor CMOS controller capable of directly interfacing between a digital system, such as a computer, and an electrostatically actuated MEMS mirror device. The controller pulse width modulates a supply voltage to vary the power applied to the MEMS mirror device. The MEMS mirror device responds with negligible position ripple to the applied average power of the pulse width modulation signal. By varying the duty cycle of the pulse width modulation signal, the position of the mirror is varied. This controller can be adapted to control other electrostatically actuated devices using the design and methodology described in this thesis. The implementation of this controller is a step toward the monolithic integration of a MEMS deformable mirror array with CMOS control electronics.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems