Accession Number:

ADA361681

Title:

Parameter Space for Collisionless RF Sheaths

Descriptive Note:

Interim rept.

Corporate Author:

NAVAL RESEARCH LAB WASHINGTON DC FUNDAMENTAL PLASMA PROCESSES

Personal Author(s):

Report Date:

1999-04-08

Pagination or Media Count:

18.0

Abstract:

As plasma processing reactors approach higher ion density, the sheath models which neglect the rf response of the ions become invalid. This work shows that at arbitrary ion density, the nature of the collisionless rf ion sheath can be described in a number of different regimes of parameter space. These regimes can all be visualized on a single two dimensional plot where the horizontal axis is the ion plasma frequency divided by the frequency, and the vertical axis is the electron oscillating velocity divided by the ion sound speed.

Subject Categories:

  • Plasma Physics and Magnetohydrodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE