Parameter Space for Collisionless RF Sheaths
NAVAL RESEARCH LAB WASHINGTON DC FUNDAMENTAL PLASMA PROCESSES
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As plasma processing reactors approach higher ion density, the sheath models which neglect the rf response of the ions become invalid. This work shows that at arbitrary ion density, the nature of the collisionless rf ion sheath can be described in a number of different regimes of parameter space. These regimes can all be visualized on a single two dimensional plot where the horizontal axis is the ion plasma frequency divided by the frequency, and the vertical axis is the electron oscillating velocity divided by the ion sound speed.
- Plasma Physics and Magnetohydrodynamics