Contributive Research & Development Volume 130: The Role of Mechanics in Microelectromechanical Systems (MEMS) Technology
Final rept. 17 Nov 97-30 Sep 98
SYSTRAN CORP DAYTON OH
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This report presents a review of recent developments in experimental and theoretical studies of the mechanical behavior of polycrystalline silicon for microelectromechanical systems MEMS, and defines research needs to predict the life and strength of MEMS devices.
- Inorganic Chemistry
- Electricity and Magnetism