DID YOU KNOW? DTIC has over 3.5 million final reports on DoD funded research, development, test, and evaluation activities available to our registered users. Click
HERE to register or log in.
Accession Number:
ADA361501
Title:
Contributive Research & Development Volume 130: The Role of Mechanics in Microelectromechanical Systems (MEMS) Technology
Descriptive Note:
Final rept. 17 Nov 97-30 Sep 98
Corporate Author:
SYSTRAN CORP DAYTON OH
Report Date:
1998-10-01
Pagination or Media Count:
157.0
Abstract:
This report presents a review of recent developments in experimental and theoretical studies of the mechanical behavior of polycrystalline silicon for microelectromechanical systems MEMS, and defines research needs to predict the life and strength of MEMS devices.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE