Accession Number:

ADA361501

Title:

Contributive Research & Development Volume 130: The Role of Mechanics in Microelectromechanical Systems (MEMS) Technology

Descriptive Note:

Final rept. 17 Nov 97-30 Sep 98

Corporate Author:

SYSTRAN CORP DAYTON OH

Personal Author(s):

• Ballarini, Roberto

Report Date:

1998-10-01

Pagination or Media Count:

157.0

Abstract:

This report presents a review of recent developments in experimental and theoretical studies of the mechanical behavior of polycrystalline silicon for microelectromechanical systems MEMS, and defines research needs to predict the life and strength of MEMS devices.

Descriptors:

• *SILICON
• *POLYCRYSTALLINE
• *MICROELECTROMECHANICAL SYSTEMS
• MECHANICAL PROPERTIES
• TENSILE STRENGTH
• EXPERIMENTAL DATA
• AIR FORCE RESEARCH
• MODULUS OF ELASTICITY
• TOUGHNESS
• FRACTURE(MECHANICS)
• CRACK PROPAGATION
• ACTUATION
• ELECTROSTATICS

Subject Categories:

• Inorganic Chemistry
• Electricity and Magnetism
• Mechanics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE