Accession Number:

ADA361481

Title:

Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability

Descriptive Note:

Final rept. Sep 97-Jan 98

Corporate Author:

ARMY RESEARCH LAB ABERDEEN PROVING GROUND MD

Report Date:

1999-04-01

Pagination or Media Count:

23.0

Abstract:

Ferroelectric barium strontium titanate Ba1-xSrxTiO3 BSTO films of 1-micron nominal thickness were deposited on single crystals of sapphire and electroded substrates at substrate temperatures varying from 30 deg C to 700 deg C. The microstructure of the thin films was columnar at all substrate deposition temperatures. The film microhardness showed a trend toward increased hardness with substrate temperature. Furthermore, with the elevation in substrate temperature, there was a parallel increase in film-substrate adhesion measurements, while the cohesion measurements were not influenced by substrate temperature.

Subject Categories:

  • Electrical and Electronic Equipment
  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE