Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability
Final rept. Sep 97-Jan 98
ARMY RESEARCH LAB ABERDEEN PROVING GROUND MD
Pagination or Media Count:
Ferroelectric barium strontium titanate Ba1-xSrxTiO3 BSTO films of 1-micron nominal thickness were deposited on single crystals of sapphire and electroded substrates at substrate temperatures varying from 30 deg C to 700 deg C. The microstructure of the thin films was columnar at all substrate deposition temperatures. The film microhardness showed a trend toward increased hardness with substrate temperature. Furthermore, with the elevation in substrate temperature, there was a parallel increase in film-substrate adhesion measurements, while the cohesion measurements were not influenced by substrate temperature.
- Electrical and Electronic Equipment
- Electricity and Magnetism