Accession Number:

ADA359105

Title:

JPRS Report, Science & Technology, Japan, Semi Technology Symposium 90

Descriptive Note:

Corporate Author:

JOINT PUBLICATIONS RESEARCH SERVICE ARLINGTON VA

Personal Author(s):

Report Date:

1991-05-17

Pagination or Media Count:

221.0

Abstract:

The report documented selected abstracted articles presented at the SEMI technology held 22-24 Oct 90 in China, Japan, sponsored by Semiconductor Materials International. The purpose of the present report was to address both basic and applied research issues regarding science and technology in Japan with particular attention to lithography, etching technology, microelectronics and solid state physics. It is expected the innovative experimental research and design standards presented in the report will play an important role in the future economic growth in Japan.

Subject Categories:

  • Electrical and Electronic Equipment
  • Printing and Graphic Arts
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE