Accession Number:

ADA347647

Title:

JPRS Report, Science and Technology: Japan. ULSI Process Technology Symposium.

Descriptive Note:

Corporate Author:

JOINT PUBLICATIONS RESEARCH SERVICE ARLINGTON VA

Personal Author(s):

Report Date:

1989-09-18

Pagination or Media Count:

52.0

Abstract:

This document presents selected papers presented at the 89 ULSI Process Technology Symposium held 7-8 Dec 88 in Tokyo, sponsored by Science Forum Co., Ltd. Topics include semiconductors, lithographic technology, etching technology, and process technology.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE