Accession Number:

ADA346575

Title:

Enhanced Process Development for Interferometric Modulators

Descriptive Note:

Final rept. 1 Aug 97-30 Apr 98

Corporate Author:

ETALON INC BOSTON MA

Personal Author(s):

Report Date:

1998-04-30

Pagination or Media Count:

6.0

Abstract:

The most significant accomplishment is the successful fabrication of devices from the test device mask set with brightness and contrast which are improved over the 5 x 7 devices. These IMods are exhibiting the expected color response, switching clearly from green to black. Actuation voltages remain in the area of 10 to 15 volts, with response times on the order of 75 microseconds. Color uniformity is also quite good, though this has only been assessed via naked eye observation. There appear to be some charging effects which are having an impact on device pull-in and released voltages.

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE