High Temperature Superconductor MCM Process Development
Final rept. 1 Oct 93-30 Sep 97
ARKANSAS UNIV FAYETTEVILLE HIGH DENSITY ELECTRONICS CENTER
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Two types of high-temperature superconducting HTS multichip modules MCMs utilizing yttrium-barium-copper oxide YBCO as the superconductor, were developed under this grant. The first was a flip mesh MCM, in which two superconducting layers, one containing X-running and one Y-running wire segments, were fabricated on separate substrates and joined in a manner similar to flip chips. The second module was a monolithic MCM, again using layers of X- and Y-running conductors, but patterned on a single substrate, with a thick layer of SiO2 serving as interlayer dielectric. Deposition of the second superconducting YBCO layer was effected by the use of an ion beam-assisted deposition IBAD buffer layer.
- Electricity and Magnetism