Silicon Micromechanical Optical Waveguide for Modulation and Sensing
MOSCOW INST OF PHYSICS AND TECHNOLOGY DOLGOPRUDNYI (RUSSIA)
Pagination or Media Count:
The microstructure, optical and mechanical properties of the silicon micromechanical optical waveguide are investigated. The physical principles of mechanical excitation of the cantilever waveguide by photothermal, magnetostriction, and by direct force action are considered. The sensor application of the developed device is analyzed.
- Electricity and Magnetism