Accession Number:

ADA336796

Title:

Microelectromechanical Optical Beam Steering Systems

Descriptive Note:

Doctoral thesis

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSONAFB OH SCHOOL OF ENGINEERING

Personal Author(s):

Report Date:

1997-12-01

Pagination or Media Count:

321.0

Abstract:

The development of microelectromechanical systems MEMS has matured to the point where the fabrication of micron sized devices is feasible. State of the art MEMS construction processes now support the fabrication of novel optical devices that could not previously be built. This dissertation reports on the development of innovative micro optical devices such as Variable Blaze Gratings VBGs using state of the art MEMS construction processes. The principle application of the micro optical devices described in this dissertation is steering optical beams however other applications such as spectral analysis are identified. Specific optical beam steering systems developed and characterized in this work include optical phased arrays, VBGs, decentered microlens arrays, and integrated Vertical Cavity Surface Emitting Laser VCSEL micro mirror systems. Optical power induced damage to micro machined mirrors is also modeled and tested. In addition a number of new MEMS devices were created during this research including double hot arm thermal actuators, optical hybrid devices such as variable blaze phased arrays and focusing micro mirrors, and non-linear flexures. Extensive Fourier analysis and optical testing of the micro optical devices was used to verify device operation.

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE