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Silicon-Micro-Disk Arrays for Data Storage
Final rept. 1 Mar 94-30 Jul 97
CARNEGIE-MELLON UNIV PITTSBURGH PA DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
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We envision arrays of silicon disk drives which are completely manufactured by planar lithographic techniques that can vastly decrease the size, weight, power requirements, cost, latency of access, and failure rate, of data storage systems. In this project we have demonstrated MEMS actuators that achieve greater than or equal 1 swept area. To achieve this goal, we have developed a custom MEMS process that starts with a standard CMOS foundry. We have achieved multiconductor movable beams that are 1.2mu wide and 5mu tall with 1.2mu spaces between beams. In addition, our MEMS process allows the creation of upward facing platinum Spindt field emission tips used for reading and writing data. Using a commercial STM system, we have demonstrated the writing of 3nm - 25nm diameter pits in a carbon thin film media. Finally, we have used the MEMS positioner to demonstrate STM operation with the platinum tips fabricated on the MEMS actuators. We project that these MEMS actuators and platinum STM tips, combined with our designs for carbon thin film media, could be used to create a 10GB WORM data storage array that requires only 1cm x 1cm x 2mm of physical space.
APPROVED FOR PUBLIC RELEASE