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Surface Chemistry in Electrochemical Atomic Layer Processing
Final rept. Apr 91-Apr 96
GEORGIA UNIV ATHENS DEPT OF CHEMISTRY
Pagination or Media Count:
Atomic layer processing involves the formation andor etching of materials an atomic layer at a time. Atomic layer epitaxy is the most obvious example, where a thin film of a material is formed an atomic layer at a time. That is, surface limited reactions are used to deposit individual atomic layers of the elements making up a compound. These reactions are used in a cycle, where each cycle results in the formation of a monolayer of the compound. The present studies were designed to investigate these surface limited reactions. To determine what the structures of the deposits were, and how that structure influenced subsequent deposition.
APPROVED FOR PUBLIC RELEASE