The USAF Manufacturing Technology Program Status Report, Fall 1997.
WRIGHT LAB WRIGHT-PATTERSON AFB OH MANTECH TECHNOLOGY TRANSFER CENTER
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A Wright Laboratory Manufacturing Technology Directorate-sponsored project has developed new instrumentation for in-line wafer-state diagnostics and process control for semiconductor fabrication which could result in significant savings when fully implemented. The significance of this achievement was recognized by RD Magazine, when the instrument received the 1996 RD 100 award, for being one of the 100 most technologically significant new products developed over the year. This award has been given over the past 34 years to such breakthroughs as Polacolor film, the flashcube, the digital wristwatch, the liquid-crystal display, the fax machine, antilock brakes, the automated teller machine and the Nicoderm antismoking patch. The new technology will improve yield, decrease reactor down-time, reduce the need for test-wafers, shrink process excursions, and tighten development cycles by implementing in-line and in-situ measurements with feedback control during device fabrication. The primary goal of the semiconductor industry is to increase device density and lower per circuit cost, while increasing yield and throughput. The most direct method to achieve this goal is through real-time process monitoring and control. Reducing the time required for obtaining high yields for new semiconductor products is particularly attractive due to military requirements for high priority components in small quantities at low costs. Prior to this effort, only a few projects had been initiated dealing with in-line or in-situ sensing. These sensors, using ellipsometry, reflectometry, pyrometry, and emission spectroscopy provided limited data and had not been widely used. More versatile sensors and the control technology that uses the sensor data were needed to achieve the potential benefits of improved manufacturing.
- *SEMICONDUCTOR DEVICES
- MILITARY REQUIREMENTS
- LOW COSTS
- REAL TIME
- DISPLAY SYSTEMS
- LIQUID CRYSTALS
- LIFE CYCLE COSTS
- EMISSION SPECTROSCOPY
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems