Accession Number:

ADA327202

Title:

Electron Specimen Interaction in Low Voltage Electron Beam Lithography,

Descriptive Note:

Corporate Author:

OREGON STATE UNIV CORVALLIS

Personal Author(s):

• Liu, Weidong

Report Date:

1995-07-01

Pagination or Media Count:

9.0

Abstract:

Enclosed are a number of monthly technical reports from July to October 95. A great deal of effort is devoted to investigation and designing of photocathode activation chamber, electron gun, electron beam analysis chamber.

Descriptors:

• *ELECTRON BEAMS
• *ELECTRON GUNS
• *PHOTOCATHODES
• TEST AND EVALUATION
• ACTIVATION
• CHAMBERS
• ULTRAHIGH VACUUM
• ELECTRON OPTICS

Subject Categories:

• Electrical and Electronic Equipment
• Test Facilities, Equipment and Methods
• Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE