Electron Specimen Interaction in Low Voltage Electron Beam Lithography,
OREGON STATE UNIV CORVALLIS
Pagination or Media Count:
Enclosed are a number of monthly technical reports from July to October 95. A great deal of effort is devoted to investigation and designing of photocathode activation chamber, electron gun, electron beam analysis chamber.
- Electrical and Electronic Equipment
- Test Facilities, Equipment and Methods
- Particle Accelerators