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Accession Number:
ADA326535
Title:
Particulate Contaminant Formation and Transport in Microelectronic Manufacturing Processes. Phase II.
Descriptive Note:
Quarterly rept. no. 5,
Corporate Author:
CFD RESEARCH CORP HUNTSVILLE AL
Report Date:
1997-05-01
Pagination or Media Count:
11.0
Abstract:
This is the fifth quarterly report documenting the work performed during a two year Phase II STTR activity entitled Particulate contaminant formation and transport in microelectronic manufacturing processes. The overall objective is to produce a charging, transport, and growth simulation CTGS tool that can be used effectively by equipment manufacturers and users to reduce particle generation in fabrication systems.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE