Accession Number:

ADA326535

Title:

Particulate Contaminant Formation and Transport in Microelectronic Manufacturing Processes. Phase II.

Descriptive Note:

Quarterly rept. no. 5,

Corporate Author:

CFD RESEARCH CORP HUNTSVILLE AL

Report Date:

1997-05-01

Pagination or Media Count:

11.0

Abstract:

This is the fifth quarterly report documenting the work performed during a two year Phase II STTR activity entitled Particulate contaminant formation and transport in microelectronic manufacturing processes. The overall objective is to produce a charging, transport, and growth simulation CTGS tool that can be used effectively by equipment manufacturers and users to reduce particle generation in fabrication systems.

Subject Categories:

  • Physical Chemistry
  • Electrical and Electronic Equipment
  • Fluid Mechanics
  • Plasma Physics and Magnetohydrodynamics
  • Computer Programming and Software

Distribution Statement:

APPROVED FOR PUBLIC RELEASE