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Particulate Contaminant Formation and Transport in Microelectronic Manufacturing Processes. Phase II.
Quarterly rept. no. 5,
CFD RESEARCH CORP HUNTSVILLE AL
Pagination or Media Count:
This is the fifth quarterly report documenting the work performed during a two year Phase II STTR activity entitled Particulate contaminant formation and transport in microelectronic manufacturing processes. The overall objective is to produce a charging, transport, and growth simulation CTGS tool that can be used effectively by equipment manufacturers and users to reduce particle generation in fabrication systems.
APPROVED FOR PUBLIC RELEASE