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Micromachined Shear Sensors for Fluid Flows.
Final rept. 1 Mar 94-31 Dec 96,
MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF ELECTRICAL ENGINEERING AND COMPU TER SCIENCE
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The three year program focused on the development of micromachined shear stress sensors for aerodynamic flows. The program supported a Ph.D. candidate at MIT Aravind Padmanabhan and resulted in the successful design and fabrication a floating element shear sensor. The sensor has been demonstrated to be the most sensitive and accurate MEMS shear sensor developed to date.
APPROVED FOR PUBLIC RELEASE