Accession Number:

ADA326190

Title:

Micromachined Shear Sensors for Fluid Flows.

Descriptive Note:

Final rept. 1 Mar 94-31 Dec 96,

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF ELECTRICAL ENGINEERING AND COMPU TER SCIENCE

Personal Author(s):

• Breuer, Kenneth S.
• Schmidt, Martin A.

Report Date:

1997-05-15

Pagination or Media Count:

220.0

Abstract:

The three year program focused on the development of micromachined shear stress sensors for aerodynamic flows. The program supported a Ph.D. candidate at MIT Aravind Padmanabhan and resulted in the successful design and fabrication a floating element shear sensor. The sensor has been demonstrated to be the most sensitive and accurate MEMS shear sensor developed to date.

Descriptors:

• *COMPUTATIONAL FLUID DYNAMICS
• *OPTICAL DETECTORS
• *AERODYNAMICS
• AIR FLOW
• TURBULENT FLOW
• TURBULENT BOUNDARY LAYER
• FLOW FIELDS
• SHEAR STRESSES
• MICROELECTRONICS
• WIND TUNNEL TESTS
• MICROMECHANICS
• PHOTODIODES
• LAMINAR FLOW
• HOT WIRE ANEMOMETERS

Subject Categories:

• Aerodynamics
• Fluid Mechanics
• Optical Detection and Detectors

Distribution Statement:

APPROVED FOR PUBLIC RELEASE